Research output per year
Research output per year
Personal profile
Personal profile
Dr. Henderson holds a bachelor's in mathematics and history from Trinity University, a master's in mathematical statistics from Southern Methodist University, an MBA from the University of Delaware and a PhD in mathematical statistics from Southern Methodist University.
Related documents
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Investigating defect inspection and sensitivity analysis for MoSi-based PSMs
Chen, J. X., Henderson, R. K. & Kalk, F., Apr 2000, In: Micro. 18, 4, p. 29-36 8 p.Research output: Contribution to journal › Article › peer-review
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Beta test performance of the Leica LWM 250 UV CD measurement tool
Henderson, R. K., 1999, In: Proceedings of SPIE - The International Society for Optical Engineering. 3873, p. I/-Research output: Contribution to journal › Conference article › peer-review
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Carbon stain effects from SEM exposure
Grantz, J., Henderson, R. K. & Wood, J., 1999, In: Proceedings of SPIE - The International Society for Optical Engineering. 3873, p. I/-Research output: Contribution to journal › Conference article › peer-review
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Measurement error revisited
Henderson, R. K., 1999, In: Proceedings of SPIE - The International Society for Optical Engineering. 3873 (I, p. 703-727 25 p.Research output: Contribution to journal › Conference article › peer-review
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MoSi PSM defect inspection and sensitivity analysis
Chen, J. X., Henderson, R. K. & Kalk, F., 1998, In: Proceedings of SPIE - The International Society for Optical Engineering. 3546, p. 121-131 11 p.Research output: Contribution to journal › Conference article › peer-review