Investigating defect inspection and sensitivity analysis for MoSi-based PSMs

Jerry X. Chen, Robert K. Henderson, Franklin Kalk

Research output: Contribution to journal › Article › peer-review

ASJC Scopus Subject Areas

@article{9f545612158549149ebf0a7493d93744,

title = "Investigating defect inspection and sensitivity analysis for MoSi-based PSMs",

author = "Chen, {Jerry X.} and Henderson, {Robert K.} and Franklin Kalk",

year = "2000",

month = apr,

language = "English",

volume = "18",

pages = "29--36",

journal = "Micro",

issn = "1081-0595",

number = "4",

}

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AU - Chen, Jerry X.

AU - Henderson, Robert K.

AU - Kalk, Franklin

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SN - 1081-0595

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JO - Micro

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