Investigating defect inspection and sensitivity analysis for MoSi-based PSMs

Jerry X. Chen, Robert K. Henderson, Franklin Kalk

Research output: Contribution to journal › Article › peer-review

ASJC Scopus Subject Areas

@article{9f545612158549149ebf0a7493d93744,

title = "Investigating defect inspection and sensitivity analysis for MoSi-based PSMs",

author = "Chen, \{Jerry X.\} and Henderson, \{Robert K.\} and Franklin Kalk",

year = "2000",

month = apr,

language = "English",

volume = "18",

pages = "29--36",

journal = "Micro",

issn = "1081-0595",

number = "4",

}

TY - JOUR

T1 - Investigating defect inspection and sensitivity analysis for MoSi-based PSMs

AU - Chen, Jerry X.

AU - Henderson, Robert K.

AU - Kalk, Franklin

PY - 2000/4

Y1 - 2000/4

UR - https://www.scopus.com/pages/publications/0346930537

UR - https://www.scopus.com/inward/citedby.url?scp=0346930537&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0346930537

SN - 1081-0595

VL - 18

SP - 29

EP - 36

JO - Micro

JF - Micro

IS - 4

ER -