| Original language | English |
|---|---|
| Pages (from-to) | 703-727 |
| Number of pages | 25 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3873 (I |
| DOIs | |
| State | Published - 1999 |
| Externally published | Yes |
| Event | 19th Annual BACUS Symposium on Photomask Technology - Monterey, CA, USA Duration: Sep 15 1999 → Sep 17 1999 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering