Investigating defect inspection and sensitivity analysis for MoSi-based PSMs

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@article{9f545612158549149ebf0a7493d93744,

title = "Investigating defect inspection and sensitivity analysis for MoSi-based PSMs",

author = "Chen, \{Jerry X.\} and Henderson, \{Robert K.\} and Franklin Kalk",

year = "2000",

month = apr,

language = "English",

volume = "18",

pages = "29--36",

journal = "Micro",

issn = "1081-0595",

number = "4",

}

TY - JOUR

T1 - Investigating defect inspection and sensitivity analysis for MoSi-based PSMs

AU - Chen, Jerry X.

AU - Henderson, Robert K.

AU - Kalk, Franklin

PY - 2000/4

Y1 - 2000/4

UR - https://www.scopus.com/pages/publications/0346930537

UR - https://www.scopus.com/pages/publications/0346930537#tab=citedBy

M3 - Article

AN - SCOPUS:0346930537

SN - 1081-0595

VL - 18

SP - 29

EP - 36

JO - Micro

JF - Micro

IS - 4

ER -